Model |
Note |
| EV-S | Etching CVD PVD SEM Inspection System Light-absorbing Layer Formation Texture Formation Edge Isolation Silicon materials Lamination Evaporation Liquid Injection Electron Microscopes Mass Spectrometers Reduced-pressure Drying Vapor Deposition／Sputtering Sterilization Plastic Molding |
| EV-M | Etching CVD P diffusion Edge Isolation Antireflective Film Formation Silicon materials |
| ESA | Etching CVD PVD ODF SEM Inspection System Ingots Light-absorbing Layer Formation Texture Formation Edge Isolation Silicon materials Lamination Evaporation Solvent Drying Liquid Injection Electron Microscopes Mass Spectrometers Vapor Deposition／Sputtering Plastic Molding Reduced-pressure Drying Sterilization |
| ESR | Etching CVD PVD SEM Inspection System P diffusion Edge Isolation Silicon materials Lamination Evaporation Drying Liquid Injection Electron Microscopes Mass Spectrometers Plastic Molding Vapor Deposition／Sputtering |
| PDV | PVD SEM Inspection System Silicon materials Lamination Evaporation Electron Microscopes Mass Spectrometers Reduced-pressure Drying Vapor Deposition／Sputtering Sterilization Plastic Molding |
| EST | CVD |
| EBANET3 | Etching CVD |
Dry Vacuum Pumps (EBARA)
