ULVAC
Dry Pump | Dry Vacuum Pump | LS |
CR | ||
GR | ||
LR | ||
HR | ||
UR | ||
Power-Saving Attachment | ES10 | |
Power Saving Accessory | ES4A | |
Oil Rotary Pump | Oil Rotary Vacuum Pump | VD |
VS650A | ||
VS750A | ||
VS | ||
PVD | ||
PKS | ||
Oil Mist Trap | TM | |
TMX | ||
Mechanical Booster Pump | Mechanical Booster Pump | PMB |
PRC | ||
Ion Pump | Sputter Ion Pump | PST-030CU |
PST-030AU | ||
Acter Pumps | PST-050CU | |
PST-050AU | ||
PST-100CX | ||
PST-100AX | ||
PST-200CX2 | ||
PST-200AX2 | ||
PST-400CX2 | ||
PST-400AX2 | ||
Ion Pump Control | GST-07L-B | |
Turbo Molecular Pump | Ceramic Ball Bearing Turbo Molecular Pump | UTM70B |
Turbo Molecular Pumping System | Desktop YTP | |
Turbo molecular pump | UTM-MI | |
Ceramic Ball Bearing Turbo Molecular Pump | UTM300B | |
Pivot Bearing Type Turbo Molecular Pumps | UTM | |
Turbo Molecular Pump System | YTP | |
Digitally-Controlled Magnetic Levitation Turbo Molecular Pump | UTM-FH | |
UTM-FW | ||
Oil Diffusion Pump | Oil Diffusion Pump | ULK |
Oil Diffusion Vacuum Pump | PFL | |
Oil Diffusion Ejector Vacuum Pump | PBL | |
Cryo Pump | Standard Cryopumps | CRYO-U4H |
CRYO-U6H | ||
CRYO-U8H | ||
CRYO-U8H-U | ||
CRYO-U8HL | ||
CRYO-U10H | ||
CRYO-U12H | ||
CRYO-U12HL | ||
CRYO-U16 | ||
CRYO-U16P | ||
CRYO-U20P | ||
CRYO-U20H | ||
CRYO-U22H | ||
CRYO-U22P | ||
CRYO-U22WB | ||
CRYO-U30H | ||
Titanium Getter Pump | Titanium Getter Pump GGT-3 | PGT |
Process Gas Monitor | Basic Process Gas Monitor Qulee | BGM2 |
Software for Gas Analysis Qulee | QCS | |
High Performance Process Gas Monitor Qulee | HGM2 | |
Software for Gas Analysis Qulee | QCS | |
Quadrupole Mass Spectrometer with Differential Pumping Kit Qulee | with YTP | |
Reactive Gas Process Monitoring System Qulee | RGM-202 | |
RGM-302 | ||
Residual Gas Analysis Process Gas Monitor Compact Process Gas Monitor Qulee |
CGM | |
Residual Gas Analysis Process Gas Monitor Basic Process Gas Monitor Qulee |
BGM | |
Residual Gas Analysis Process Gas Monitor High Performance Process Gas Monitor Qulee |
HGM | |
Leak Detector | Leak Detector | HELIOT 900 |
HELIOT ZERO | ||
Thin Film Measurement/Deposition Controller | Spectroscopic Ellipsometer | UNECS-Portable |
UNECS-1500M | ||
UNECS-1500A | ||
UNECS-2000A | ||
UNECS-3000A | ||
UNECS-1M | ||
Film Thickness Measurement | MESEC | |
Deposition Controller | CRTM-6000G | |
CRTM-9200 | ||
CRTS-M6 | ||
CRTS-12NS | ||
Optical Process Monitor | Optical Process Monitor | Optius |
Vacuum Valve | Vacuum Angle Valve | VLP-SA |
VLP-SB | ||
VLP-MB | ||
VLB-SA | ||
VLB-SB | ||
VLH-SB | ||
VLH-MB | ||
VLP-U | ||
Gate Valve | VFR | |
VAH | ||
VAP | ||
Other Types of Valve | 10AI | |
VUH | ||
Parts for Ultra-High Vacuum | Ultra-High Vacuum Flanges | UFC |
Ultra-High Vacuum Zero-Length Reducer Flanges | UFC | |
Ultra-High Vacuum Zero-Length Viewing Ports | TVU-FV | |
Ultra-High Vacuum Rotary Feedthroughs | TDU | |
Ultra-High Vacuum Linear Feedthroughs | TSU | |
Electrical Feedthroughs | CMS | |
Power Generator | Power Generator | DPG |
Bipolar unit for dual cathode | MFU-20K | |
Pulsed DC Power generators | DPG-5P | |
DPG-10P | ||
Active Arc Killer | A2K | |
DC Power generator | DPG-10 | |
DPG-20 | ||
EB Power Generator | HPS-N | |
EB Gun for Optical Evaporation | EGP-1G | |
EB Gun for Metal Evaporation | EGN | |
RF Power Supply | RFS-N | |
EB gun for vacuum evaporation | EGK | |
EGL | ||
EGO | ||
DC Power Supply | DCS | |
Transfer Robot | Vacuum Transfer Robot | ELEC-RZ |
COVOT-LC | ||
COVOT-6 | ||
Vacuum Transfer Platform | NCH | |
Precise Microplate Paddle Mixer | MICROPADDLE | IMP096A |